Effect of High-Temperature Annealing Heat Treatment to Microstructure of Aluminium Nitride on Sapphire Substrate

Authors

  • Zaimi Tanasta Department of Mechanical Precision Engineering, Faculty of Malaysia Japan International Institute of Technology, Universiti Teknologi Malaysia, 54100 Kuala Lumpur, Wilayah Persekutuan Kuala Lumpur, Malaysia
  • Pauziah Muhamad Department of Mechanical Precision Engineering, Faculty of Malaysia Japan International Institute of Technology, Universiti Teknologi Malaysia, 54100 Kuala Lumpur, Wilayah Persekutuan Kuala Lumpur, Malaysia
  • Noriyuki Kuwano Department of Mechanical Precision Engineering, Faculty of Malaysia Japan International Institute of Technology, Universiti Teknologi Malaysia, 54100 Kuala Lumpur, Wilayah Persekutuan Kuala Lumpur, Malaysia
  • Mohd Hishamuddin Unuh Department of Mechanical Precision Engineering, Faculty of Malaysia Japan International Institute of Technology, Universiti Teknologi Malaysia, 54100 Kuala Lumpur, Wilayah Persekutuan Kuala Lumpur, Malaysia
  • Mohd Hafiz Amran Department of Mechanical Precision Engineering, Faculty of Malaysia Japan International Institute of Technology, Universiti Teknologi Malaysia, 54100 Kuala Lumpur, Wilayah Persekutuan Kuala Lumpur, Malaysia

Keywords:

aluminium nitride, AlN, annealing heat treatment, inversion domain, microstructure

Abstract

Aluminium Nitride (AIN) is classified in the 3rd nitride ceramic materials and able to emit the lights at shorter wavelength of 210 nm with high band gap up to 6 eV. In addition, with thermal conductivity up to 140 W/mK has made this material in demand for electronic devices applications such as light emitting diode, laser diode and photodetector for the ultraviolet region. However, previous researchers have confirmed the existence of defects in the microstructure of AlN that affected the properties of this material during the growth process. Hence, high-temperature annealing heat treatment is utilized as one of the methods to cure the problems of AlN thin film. Therefore, this paper is about to identify the effects of high-temperature annealing heat treatment on the microstructure of AlN. The changes on microstructure were observed through Transmission Electron Microscopy after the annealing process. The results showed an increase of the annealing temperature contributed to the reduction of defects in the microstructure of AlN.

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Published

2020-12-14

How to Cite

Tanasta, Z. ., Muhamad, P. ., Kuwano, N. ., Unuh, M. H. ., & Amran, M. H. . (2020). Effect of High-Temperature Annealing Heat Treatment to Microstructure of Aluminium Nitride on Sapphire Substrate. Journal of Advanced Research in Fluid Mechanics and Thermal Sciences, 56(2), 267–275. Retrieved from https://www.akademiabaru.com/submit/index.php/arfmts/article/view/2506

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